Lecture Notes in Electrical Engineering

MEMS: Field Models and Optimal Design

Authors: Di Barba, Paolo, Wiak, Slawomir

Free Preview
  • Describes modern numerical methods for MEMS analysis and design
  • Reports on automated optimal design and field-based models of MEMS 
  • Shows applications to NEMS devices as well
see more benefits

Buy this book

eBook $109.00
price for USA in USD
  • ISBN 978-3-030-21496-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $149.99
price for USA in USD
Softcover $109.99
price for USA in USD
About this book

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

Table of contents (14 chapters)

Table of contents (14 chapters)

Buy this book

eBook $109.00
price for USA in USD
  • ISBN 978-3-030-21496-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $149.99
price for USA in USD
Softcover $109.99
price for USA in USD
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
MEMS: Field Models and Optimal Design
Authors
Series Title
Lecture Notes in Electrical Engineering
Series Volume
573
Copyright
2020
Publisher
Springer International Publishing
Copyright Holder
Springer Nature Switzerland AG
eBook ISBN
978-3-030-21496-8
DOI
10.1007/978-3-030-21496-8
Hardcover ISBN
978-3-030-21495-1
Softcover ISBN
978-3-030-21498-2
Series ISSN
1876-1100
Edition Number
1
Number of Pages
IX, 190
Topics