About this book series
Future publications in the Microsystems series are being directed into the Microsystems and Nanosystems series. To learn more about this series, including a list of published and forthcoming titles, please visit https://www.springer.com/series/11483.
Microsystems provides an outstanding library of research, text, and reference materials in the field of Microsystems. Subject coverage includes:
- Microfabricated sensors, actuators, components and systems;
- Micromachining and microfabrication technology;
- Design and simulation tools for microsystems;
- Integrated electronics for microsystems;
- Packaging and assembly technology;
- Applications to:
- optics;
- biology;
- avionics;
- fluidics;
- medicine;
- mechanics;
- chemistry;
- communications;
- mass data storage;
- environmental science;
- information technology;
- heat engines and power generation;
- automotive and transportation systems;
- factory automation and equipment monitoring.
- Research monographs by senior authors
- Edited volumes on selected topics
- Outstanding Ph.D. dissertations
- Print ISSN
- 1389-2134
