Microsystems

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

Authors: Lammel, Gerhard, Schweizer, Sandra, Renaud, Philippe

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About this book

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.

An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.

The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook 117,69 €
price for Spain (gross)
  • ISBN 978-1-4757-6083-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 166,39 €
price for Spain (gross)
  • ISBN 978-0-7923-7655-2
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 155,99 €
price for Spain (gross)
  • ISBN 978-1-4419-4946-2
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
Authors
Series Title
Microsystems
Series Volume
14
Copyright
2002
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4757-6083-5
DOI
10.1007/978-1-4757-6083-5
Hardcover ISBN
978-0-7923-7655-2
Softcover ISBN
978-1-4419-4946-2
Series ISSN
1389-2134
Edition Number
1
Number of Pages
XII, 268
Topics