Overview
- Editors:
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Uwe Kortshagen
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University of Minnesota, Minneapolis, USA
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Lev D. Tsendin
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St. Petersburg State Technical University, St. Petersburg, Russia
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Table of contents (33 chapters)
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Inductively Coupled Plasmas
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- Ming Li, Hiroyuki Date, David B. Graves
Pages 349-366
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- D. J. Economou, J. Feldsien, R. S. Wise
Pages 367-390
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Discharge Kinetics in Molecular Mass
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- Carlos M. Ferreira, Boris F. Gordiets
Pages 391-407
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- F. G. Baksht, V. G. Ivanov
Pages 409-422
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Magnetized Discharges, Surface Wave Discharges
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- S. Grosse, H. Schlüter, M. Schlüter
Pages 423-440
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- Zoran Lj. Petrović, Slobodan B. Vrhovac
Pages 441-458
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- D. K. Otorbaev, Zhou Qing, G. J. H. Brussaard, M. C. M. van de Sanden, D. C. Schram
Pages 459-469
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Advanced Diagnostics I
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- J. E. Lawler, J. J. Curry
Pages 471-487
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- A. E. Wendt, D. F. Beale, W. N. G. Hitchon, E. Keiter, V. Kolobov, L. Mahoney et al.
Pages 489-502
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- W. G. Graham, C. M. O. Mahony
Pages 503-510
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- Lawrence J. Overzet, Jennifer Kleber
Pages 511-523
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Advanced Diagnostics II
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- A. S. Smirnov, K. E. Orlov
Pages 525-530
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- A. P. Mezentsev, A. S. Mustafaev, V. L. Fedorov
Pages 531-545
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Back Matter
Pages 547-557
About this book
This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
Editors and Affiliations
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University of Minnesota, Minneapolis, USA
Uwe Kortshagen
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St. Petersburg State Technical University, St. Petersburg, Russia
Lev D. Tsendin