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Table of contents (63 papers)
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Transient Annealing
Keywords
Editors and Affiliations
Bibliographic Information
Book Title: Ion Implantation: Equipment and Techniques
Book Subtitle: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
Editors: Heiner Ryssel, Hans Glawischnig
Series Title: Springer Series in Electronics and Photonics
DOI: https://doi.org/10.1007/978-3-642-69156-0
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1983
Softcover ISBN: 978-3-642-69158-4Published: 07 December 2011
eBook ISBN: 978-3-642-69156-0Published: 06 December 2012
Series ISSN: 0172-5734
Edition Number: 1
Number of Pages: X, 558
Topics: Crystallography and Scattering Methods, Optics, Lasers, Photonics, Optical Devices