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Table of contents (51 chapters)
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Materials & Devices
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Processing Technologies
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: Crucial Issues in Semiconductor Materials and Processing Technologies
Editors: S. Coffa, F. Priolo, E. Rimini, J. M. Poate
Series Title: NATO Science Series E:
DOI: https://doi.org/10.1007/978-94-011-2714-1
Publisher: Springer Dordrecht
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media Dordrecht 1992
Hardcover ISBN: 978-0-7923-2003-6Published: 31 October 1992
Softcover ISBN: 978-94-010-5203-0Published: 13 October 2012
eBook ISBN: 978-94-011-2714-1Published: 06 December 2012
Series ISSN: 0168-132X
Edition Number: 1
Number of Pages: XIX, 538
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Optical and Electronic Materials, Electrical Engineering