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Book Title: Simulation of Semiconductor Processes and Devices 2001
Book Subtitle: SISPAD 01
Editors: Dimitris Tsoukalas, Christos Tsamis
DOI: https://doi.org/10.1007/978-3-7091-6244-6
Publisher: Springer Vienna
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Wien 2001
Hardcover ISBN: 978-3-211-83708-5Published: 21 August 2001
Softcover ISBN: 978-3-7091-7278-0Published: 14 October 2012
eBook ISBN: 978-3-7091-6244-6Published: 06 December 2012
Edition Number: 1
Number of Pages: XV, 455
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Nanotechnology