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Secondary Ion Mass Spectrometry SIMS V

Proceedings of the Fifth International Conference, Washington, DC, September 30 – October 4, 1985

  • Conference proceedings
  • © 1986

Overview

Part of the book series: Springer Series in Chemical Physics (CHEMICAL, volume 44)

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Table of contents (149 papers)

  1. Combined Techniques and Surface Studies

  2. Ion Microscopy and Image Analysis

  3. Depth Profiling and Semiconductor Applications

Keywords

Editors and Affiliations

  • Physikalisches Institut, Universität Münster, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  • Chemistry Division, Naval Research Laboratory, USA

    Richard J. Colton

  • Center for Analytical Chemistry, National Bureau of Standards, Gaithersburg, USA

    David S. Simons

  • Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

Bibliographic Information

  • Book Title: Secondary Ion Mass Spectrometry SIMS V

  • Book Subtitle: Proceedings of the Fifth International Conference, Washington, DC, September 30 – October 4, 1985

  • Editors: Alfred Benninghoven, Richard J. Colton, David S. Simons, Helmut W. Werner

  • Series Title: Springer Series in Chemical Physics

  • DOI: https://doi.org/10.1007/978-3-642-82724-2

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1986

  • Softcover ISBN: 978-3-642-82726-6Published: 11 January 2012

  • eBook ISBN: 978-3-642-82724-2Published: 06 December 2012

  • Series ISSN: 0172-6218

  • Series E-ISSN: 2364-9003

  • Edition Number: 1

  • Number of Pages: XXII, 564

  • Topics: Mass Spectrometry, Solid State Physics, Spectroscopy and Microscopy, Physical Chemistry

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