Springer Series in Materials Science

Laser Heat-Mode Lithography

Principle and Methods

Authors: Wei, Jingsong

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  • Systematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer
  • Presents the latest research results on laser heat-mode nanolithography and grayscale lithography
  • Provides a sound method for arbitrarily tuning the lithographic feature size from nanoscale to micrometer without changing the laser spot size
  • Provides a feasible technique for high-speed large-area micro/nano-fabrication of arbitrary pattern structures
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eBook $109.00
price for USA in USD (gross)
  • ISBN 978-981-15-0943-8
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Hardcover $149.99
price for USA in USD
  • ISBN 978-981-15-0942-1
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  • Usually dispatched within 3 to 5 business days.
About this book

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.

About the authors

Jingsong Wei received the Ph.D. degree in Chinese Academy of Sciences. He is currently a Professor with Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He has published more than 120 articles in professional journals including Applied Physics Letters, Optics Express, Optics Letters, etc. His research interests include miro/nanolithography, super-resolution optics, and optical instruments. 

 


Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook $109.00
price for USA in USD (gross)
  • ISBN 978-981-15-0943-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $149.99
price for USA in USD
  • ISBN 978-981-15-0942-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Laser Heat-Mode Lithography
Book Subtitle
Principle and Methods
Authors
Series Title
Springer Series in Materials Science
Series Volume
291
Copyright
2019
Publisher
Springer Singapore
Copyright Holder
Springer Nature Singapore Pte Ltd.
eBook ISBN
978-981-15-0943-8
DOI
10.1007/978-981-15-0943-8
Hardcover ISBN
978-981-15-0942-1
Series ISSN
0933-033X
Edition Number
1
Number of Pages
XIII, 208
Number of Illustrations
22 b/w illustrations, 160 illustrations in colour
Topics