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Micro and Nano Machined Electrometers

Editors: Zhu, Yong (Ed.)

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  • Reviews the latest advances in micro- and nano-electrometers
  • Discusses the technological challenges involved in their practical implementation
  • Explores a broad range of applications, e.g. scanning tunneling microscopes, radiation, and particle measurements
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eBook $129.00
price for USA in USD (gross)
  • ISBN 978-981-13-3247-0
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $169.99
price for USA in USD
  • ISBN 978-981-13-3246-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.


About the authors

Dr Yong Zhu is a full member of Queensland Micro- and Nanotechnology Centre (QMNC), and a senior lecturer in Electrical and Electronic Engineering at Griffith University, Australia. In 2005, He was conferred his PhD degree in Microelectronics and Solid State Electronics from Peking University, China. In 2006, Dr Zhu received a Postdoctoral Fellowship from the Department of Engineering, University of Cambridge, UK, where he developed high-precision MEMS electrometer, mass balance and radio frequency resonator. From 2008 to 2011, he was a Research Academic at the School of Electrical Engineering and Computer Science, the University of Newcastle, Australia.
His research focuses on MEMS and NEMS devices, including MEMS electrometer, SiC-based sensor, power harvester, nanopositioner, microactuator, biomedical sensors, radio frequency devices, etc.


Table of contents (7 chapters)

Table of contents (7 chapters)
  • Micromachined Resonant Electrometers

    Pages 1-42

    Xie, Jin (et al.)

  • Micro-electrometer Based on Mode-Localization Effect

    Pages 43-81

    Zhao, Chun (et al.)

  • Radio-Frequency Capacitive Gate-Based Charge Sensing for Semiconductor Quantum Dots

    Pages 83-128

    Ahmed, Imtiaz (et al.)

  • Micro Electrometers Based on Micromachined Time-Modulated Variable Capacitors

    Pages 129-153

    Lee, Joshua E.-Y.

  • Micromachined Vibrating-Reed Electrometer in Silicon-on-Glass Technology

    Pages 155-181

    Ruan, Yong (et al.)

Buy this book

eBook $129.00
price for USA in USD (gross)
  • ISBN 978-981-13-3247-0
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $169.99
price for USA in USD
  • ISBN 978-981-13-3246-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Micro and Nano Machined Electrometers
Editors
  • Yong Zhu
Copyright
2020
Publisher
Springer Singapore
Copyright Holder
Springer Nature Singapore Pte Ltd.
eBook ISBN
978-981-13-3247-0
DOI
10.1007/978-981-13-3247-0
Hardcover ISBN
978-981-13-3246-3
Edition Number
1
Number of Pages
V, 220
Number of Illustrations
17 b/w illustrations, 124 illustrations in colour
Topics