Micro/Nano Technologies

Micro and Nano Fabrication Technology

Editors: Yan, Jiwang (Ed.)

  • The latest micro/nanofabrication technology and manufacturing research
  • Comprehensive and multidisciplinary knowledge and methodology
  • For specialists as well as researchers and students of related disciplines at
  • With contributions from the best experts worldwide
see more benefits

Buy this book

Print + eBook $899.99
price for USA in USD
  • ISBN 978-981-13-0099-8
  • Free shipping for individuals worldwide
  • Online orders shipping within 2-3 days.
Print $599.99
price for USA in USD
  • ISBN 978-981-13-0097-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
eReference $599.99
price for USA in USD (gross)
  • ISBN 978-981-13-0098-1
  • Free shipping for individuals worldwide
About this book

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.

About the authors

Prof. Jiwang Yan is currently a professor of Mechanical Engineering at Keio University, Japan, leading the Laboratory for Precision Machining and Nano Processing (PMNP). His research areas include ultraprecision machining, micro/nanomanufacturing, material processing, and nanomechanics. He has led the implementation of tens of research projects supported by governments and industry to develop key fabrication processes for optics, molds, cutting/grinding tools, semiconductor substrates, batteries, and biomechanical components. He has received a few tens of awards from academic societies and scientific foundations for his contributions in research. He is now a member of the Japan Society of Mechanical Engineers (JSME), Japan Society for Precision Engineering (JSPE), Japan Society for Abrasive Technology (JSAT), Japan Society for Applied Physics (JSAP), American Society for Precision Engineering (ASPE), European Society for Precision Engineering and Nanotechnology (euspen), and the International Academy for Production Engineering (CIRP). He also serves on the editorial boards for several academic journals, such as the International Journal of Machine Tools and Manufacture (IJMTM).

Buy this book

Print + eBook $899.99
price for USA in USD
  • ISBN 978-981-13-0099-8
  • Free shipping for individuals worldwide
  • Online orders shipping within 2-3 days.
Print $599.99
price for USA in USD
  • ISBN 978-981-13-0097-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
eReference $599.99
price for USA in USD (gross)
  • ISBN 978-981-13-0098-1
  • Free shipping for individuals worldwide
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Micro and Nano Fabrication Technology
Editors
  • Jiwang Yan
Series Title
Micro/Nano Technologies
Copyright
2018
Publisher
Springer Singapore
Copyright Holder
Springer Nature Singapore Pte Ltd.
Print + eBook ISBN
978-981-13-0099-8
Print ISBN
978-981-13-0097-4
eReference ISBN
978-981-13-0098-1
Series ISSN
2522-5065
Edition Number
1
Number of Pages
XX, 957
Number of Illustrations and Tables
268 b/w illustrations, 549 illustrations in colour
Topics