Editors:
- Comprehensive summary of micro/nano technology in fabrications
- Contributors are world-class experts in their research areas
- Continuous online updates and publication to provide up-to-date reference content
- Includes supplementary material: sn.pub/extras
Part of the book series: Micro/Nano Technologies (MNT)
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Table of contents (40 entries)
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Front Matter
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Modeling of Processing, Structures, and Devices in MEMS
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Front Matter
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Characterization and Test of Materials and Microstructures in MEMS
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Front Matter
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Physical Microsensors
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Front Matter
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About this book
The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
Editors and Affiliations
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Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China
Qing-An Huang
About the editor
Prof. Xiaohao Wang is currently a professor in Department of Precision Instrument, Tsinghua University. He also serves as Associate Dean of Education and Director of the Division of Advanced Manufacturing, Graduate School at Shenzhen, Tsinghua University, and executive vice secretary general of the Chinese Society of Micro-Nano Technology (CSMNT). Prof. Xiaohao Wang received bachelor degree and ph. D both from Tsinghua University in 1994 and 1999, respectively. During 1998 to 2001, he joined the Department of Precision Instrument in Tsinghua University as an assistant professor, and was promoted to associate professor in 2001. During 2007 to 2008, he was a visiting scholar at Technische Universitaet Berlin. In 2010, he became a professor of the Department of Precision Instrument in Tsinghua University. His research interests cover MEMS based sensors, actuators, ionizing sources and portable Mass Spectrometer, Ion Mobility Spectrometer, High-Field Asymmetric Waveform Ion Mobility Spectrometer. He has published over 100 technical papers and applied tens of patents in the area of MEMS and the portable instrumentation.
Bibliographic Information
Book Title: Micro Electro Mechanical Systems
Editors: Qing-An Huang
Series Title: Micro/Nano Technologies
DOI: https://doi.org/10.1007/978-981-10-5945-2
Publisher: Springer Singapore
eBook Packages: Engineering, Reference Module Computer Science and Engineering
Copyright Information: Springer Nature Singapore Pte Ltd. 2018
Hardcover ISBN: 978-981-10-5944-5Published: 04 May 2018
eBook ISBN: 978-981-10-5945-2Published: 19 April 2018
Series ISSN: 2522-5065
Series E-ISSN: 2522-5073
Edition Number: 1
Number of Pages: XXIV, 1479
Number of Illustrations: 246 b/w illustrations, 876 illustrations in colour
Topics: Mechatronics, Nanotechnology and Microengineering, Electronics and Microelectronics, Instrumentation, Microwaves, RF and Optical Engineering