Simulation of Semiconductor Devices and Processes

Vol.5

Editors: Selberherr, Siegfried, Stippel, Hannes, Strasser, Ernst (Eds.)

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About this book

The "Fifth International Conference on Simulation of Semiconductor Devices and Processes" (SISDEP 93) continues a series of conferences which was initiated in 1984 by K. Board and D. R. J. Owen at the University College of Wales, Swansea, where it took place a second time in 1986. Its organization was succeeded by G. Baccarani and M. Rudan at the University of Bologna in 1988, and W. Fichtner and D. Aemmer at the Federal Institute of Technology in Zurich in 1991. This year the conference is held at the Technical University of Vienna, Austria, September 7 - 9, 1993. This conference shall provide an international forum for the presentation of out­ standing research and development results in the area of numerical process and de­ vice simulation. The miniaturization of today's semiconductor devices, the usage of new materials and advanced process steps in the development of new semiconduc­ tor technologies suggests the design of new computer programs. This trend towards more complex structures and increasingly sophisticated processes demands advanced simulators, such as fully three-dimensional tools for almost arbitrarily complicated geometries. With the increasing need for better models and improved understand­ ing of physical effects, the Conference on Simulation of Semiconductor Devices and Processes brings together the simulation community and the process- and device en­ gineers who need reliable numerical simulation tools for characterization, prediction, and development.

Table of contents (49 chapters)

  • Challenges to Achieving Accurate Three-Dimensional Process Simulation

    Law, M. E.

    Pages 1-8

  • Modeling Nano-Structure Devices

    Hess, K. (et al.)

    Pages 9-16

  • About Boltzmann Equations for Transport Modeling in Semiconductors

    Poupaud, F.

    Pages 17-20

  • Applied TCAD in Mega-Bits Memory Design

    Masuda, H. (et al.)

    Pages 21-24

  • Process Flow Representation within the VISTA Framework

    Pichler, Ch. (et al.)

    Pages 25-28

Buy this book

eBook $59.99
price for USA in USD (gross)
  • ISBN 978-3-7091-6657-4
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $79.99
price for USA in USD
  • ISBN 978-3-7091-7372-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Simulation of Semiconductor Devices and Processes
Book Subtitle
Vol.5
Editors
  • Siegfried Selberherr
  • Hannes Stippel
  • Ernst Strasser
Copyright
1993
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag Wien
eBook ISBN
978-3-7091-6657-4
DOI
10.1007/978-3-7091-6657-4
Softcover ISBN
978-3-7091-7372-5
Edition Number
1
Number of Pages
XX, 507
Topics