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Simulation of Semiconductor Devices and Processes

Editors: Ryssel, Heiner, Pichler, Peter (Eds.)

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  • ISBN 978-3-7091-6619-2
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About this book

SISDEP ’95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the latest results obtained by scientists from more than 20 countries on process simulation and modeling, simulation of process equipment, device modeling and simulation of novel devices, power semiconductors, and sensors, on device simulation and parameter extraction for circuit models, practical application of simulation, numerical methods, and software.

Table of contents (49 chapters)

  • Numerical Modelling and Materials Characterisation for Integrated Micro Electro Mechanical Systems

    Baltes, Henry (et al.)

    Pages 1-9

  • Fast and Accurate Aerial Imaging Simulation for Layout Printability Optimization

    Axelrad, V.

    Pages 10-13

  • Efficient and Rigorous 3D Model for Optical Lithography Simulation

    Lucas, Kevin D. (et al.)

    Pages 14-17

  • Application of the Two-dimensional Numerical Simulation for the Description of Semiconductor Gas Sensors

    Schipanski, D. (et al.)

    Pages 18-21

  • Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation

    Lades, M. (et al.)

    Pages 22-25

Buy this book

eBook $59.99
price for USA in USD (gross)
  • ISBN 978-3-7091-6619-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $79.99
price for USA in USD
  • ISBN 978-3-7091-7363-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Simulation of Semiconductor Devices and Processes
Editors
  • Heiner Ryssel
  • Peter Pichler
Copyright
1995
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag Wien
eBook ISBN
978-3-7091-6619-2
DOI
10.1007/978-3-7091-6619-2
Softcover ISBN
978-3-7091-7363-3
Edition Number
1
Number of Pages
XIV, 501
Topics