Topics in Applied Physics

Sputtering by Particle Bombardment I

Physical Sputtering of Single-Element Solids

Editors: Behrisch, R. (Ed.)

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Table of contents (5 chapters)

Table of contents (5 chapters)

Buy this book

eBook $84.99
price for USA in USD (gross)
  • The eBook version of this title will be available soon
  • ISBN 978-3-540-38514-1
  • Digitally watermarked, DRM-free
  • Included format:
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $109.99
price for USA in USD
  • ISBN 978-3-662-30888-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Sputtering by Particle Bombardment I
Book Subtitle
Physical Sputtering of Single-Element Solids
Editors
  • R. Behrisch
Series Title
Topics in Applied Physics
Series Volume
47
Copyright
1981
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-540-38514-1
DOI
10.1007/3-540-10521-2
Softcover ISBN
978-3-662-30888-2
Series ISSN
0303-4216
Edition Number
1
Number of Pages
XI, 284
Number of Illustrations
19 b/w illustrations
Topics