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Springer Series in Chemical Physics

Secondary Ion Mass Spectrometry SIMS III

Proceedings of the Third International Conference, Technical University, Budapest, Hungary, August 30–September 5, 1981

Editors: Benninghoven, A., Giber, J., Laszlo, J., Riedel, M., Werner, H.W. (Eds.)

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About this book

Following the biannual meetings in MUnster (1977) and Stanford (1979) the Third International Conference on Secondary Ion Mass Spectroscopy was held in Budapest from August 31 to September 5, 1981. The Conference was attended by about 250 participants. The success of the 1981 Conference in Budapest was especially due to the excellent preparation and organization by the Local Organizing Committee. We would also like to acknowledge the generous hospitality and cooperation of the Hungarian Academy of Sciences. Japan was chosen to be the location for the next conference in 1983. SIMS conferences are devoted to two main issues: improving the application of SIMS in different and especially new fields, and understanding the ion formation process. Needless to say, there is a very strong interaction be­ tween these two issues. The major reason for the rapid increase in SIMS activities in the last few years is the fact that SIMS is a powerful tool for bulk, thin-film, and surface analysis. Today it is extensively and successfully applied in such different fields as depth profiling and imaging of semiconductor devices, in isotope analysis of minerals, in imaging biological tissues, in the study of catalysts and catalytic reactions, in oxide-layer analysis on metals in drug detection, and in the analysis of body fluids.

Table of contents (69 chapters)

Table of contents (69 chapters)
  • Instrumental Aspects of Spatially 3-Dimensional SIMS Analysis

    Pages 2-21

    Rüdenauer, F. G.

  • Some Problems of Construction Implied by Requirements of Up-To-Date SIMS Instrumentation

    Pages 22-29

    Gerlach, R. L.

  • Description and Applications fo a New Design Cs+ Ion Source on the COALA Ion Microprobe for Negative Ion SIMS

    Pages 30-37

    Bentz, B. L. (et al.)

  • Operational Data of a Simple Microfocus Gun Using an EHD-Type Indium Ion Source

    Pages 38-42

    Higatsberger, M. J. (et al.)

  • First Results on a Scanning Ion Microprobe Equipped with an EHD-Type Indium Primary Ion Source

    Pages 43-48

    Rüdenauer, F. G. (et al.)

Buy this book

eBook $109.00
price for USA in USD (gross)
  • ISBN 978-3-642-88152-7
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $139.00
price for USA in USD
  • ISBN 978-3-642-88154-1
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Secondary Ion Mass Spectrometry SIMS III
Book Subtitle
Proceedings of the Third International Conference, Technical University, Budapest, Hungary, August 30–September 5, 1981
Editors
  • A. Benninghoven
  • J. Giber
  • J. Laszlo
  • M. Riedel
  • H.W. Werner
Series Title
Springer Series in Chemical Physics
Series Volume
19
Copyright
1982
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-88152-7
DOI
10.1007/978-3-642-88152-7
Softcover ISBN
978-3-642-88154-1
Series ISSN
0172-6218
Edition Number
1
Number of Pages
XI, 447
Topics

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