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Springer Series in Materials Science

Laser Processing of Thin Films and Microstructures

Oxidation, Deposition and Etching of Insulators

Authors: Boyd, Ian W.

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About this Textbook

This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro­ cessing of thin films, particularly, though by no means exclu­ sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro­ duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea­ tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.

Table of contents (8 chapters)

Table of contents (8 chapters)

Buy this book

eBook $64.99
price for USA in USD
  • ISBN 978-3-642-83136-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $84.99
price for USA in USD
  • ISBN 978-3-642-83138-6
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Laser Processing of Thin Films and Microstructures
Book Subtitle
Oxidation, Deposition and Etching of Insulators
Authors
Series Title
Springer Series in Materials Science
Series Volume
3
Copyright
1987
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-83136-2
DOI
10.1007/978-3-642-83136-2
Softcover ISBN
978-3-642-83138-6
Series ISSN
0933-033X
Edition Number
1
Number of Pages
VIII, 320
Topics

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