Springer Series in Electronics and Photonics

Ion Implantation Techniques

Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982

Editors: Ryssel, H., Glawischnig, H. (Eds.)

Free Preview

Buy this book

eBook $119.00
price for USA in USD (gross)
  • ISBN 978-3-642-68779-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $159.99
price for USA in USD
  • ISBN 978-3-642-68781-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.

Table of contents (16 chapters)

Table of contents (16 chapters)

Buy this book

eBook $119.00
price for USA in USD (gross)
  • ISBN 978-3-642-68779-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $159.99
price for USA in USD
  • ISBN 978-3-642-68781-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Ion Implantation Techniques
Book Subtitle
Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
Editors
  • H. Ryssel
  • H. Glawischnig
Series Title
Springer Series in Electronics and Photonics
Series Volume
10
Copyright
1982
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-68779-2
DOI
10.1007/978-3-642-68779-2
Softcover ISBN
978-3-642-68781-5
Series ISSN
0172-5734
Edition Number
1
Number of Pages
XII, 374
Topics