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Microsystem Technology and Microrobotics

  • Book
  • © 1997

Overview

Authors:
  1. Sergej Fatikow

    1. TU Karlsruhe, Karlsruhe, Germany

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  2. Ulrich Rembold

    1. TU Karlsruhe, Karlsruhe, Germany

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-XII
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  2. Ideas and Problems of Microsystem Technology and Microrobotics

    • Sergej Fatikow, Ulrich Rembold
    Pages 1-23

  3. Microsystem Technology Applications

    • Sergej Fatikow, Ulrich Rembold
    Pages 24-45

  4. Techniques of Microsystem Technology

    • Sergej Fatikow, Ulrich Rembold
    Pages 46-65

  5. Key Processes to Produce Micromechanical Components

    • Sergej Fatikow, Ulrich Rembold
    Pages 66-108

  6. Microactuators: Principles and Examples

    • Sergej Fatikow, Ulrich Rembold
    Pages 109-208

  7. Microsensors: Principles and Examples

    • Sergej Fatikow, Ulrich Rembold
    Pages 209-262

  8. MST and Information Processing

    • Sergej Fatikow, Ulrich Rembold
    Pages 263-302

  9. Microrobotics

    • Sergej Fatikow, Ulrich Rembold
    Pages 303-365

  10. Back Matter

    Pages 366-408
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Keywords

About this book

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Authors and Affiliations

  • TU Karlsruhe, Karlsruhe, Germany

    Sergej Fatikow, Ulrich Rembold

Bibliographic Information

  • Book Title: Microsystem Technology and Microrobotics

  • Authors: Sergej Fatikow, Ulrich Rembold

  • DOI: https://doi.org/10.1007/978-3-662-03450-7

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1997

  • Hardcover ISBN: 978-3-540-60658-1Published: 20 March 1997

  • Softcover ISBN: 978-3-642-08232-0Published: 03 December 2010

  • eBook ISBN: 978-3-662-03450-7Published: 17 April 2013

  • Edition Number: 1

  • Number of Pages: XII, 408

  • Topics: Artificial Intelligence, Complexity, Electronics and Microelectronics, Instrumentation

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