Microsystem Technology and Microrobotics

Authors: Fatikow, Sergej, Rembold, Ulrich

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About this book

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

Table of contents (8 chapters)

Table of contents (8 chapters)

Buy this book

eBook $139.00
price for USA in USD (gross)
  • ISBN 978-3-662-03450-7
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $179.99
price for USA in USD
  • ISBN 978-3-540-60658-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.00
price for USA in USD
  • ISBN 978-3-642-08232-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Microsystem Technology and Microrobotics
Authors
Copyright
1997
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-662-03450-7
DOI
10.1007/978-3-662-03450-7
Hardcover ISBN
978-3-540-60658-1
Softcover ISBN
978-3-642-08232-0
Edition Number
1
Number of Pages
XII, 408
Topics