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  • Book
  • © 1999

High-Resolution X-Ray Scattering from Thin Films and Multilayers

  • First monograph on thin-layer and multilayer x-ray analysis
  • Up-to-date review
  • Critical overview of the literature

Part of the book series: Springer Tracts in Modern Physics (STMP, volume 149)

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About this book

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.

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