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Topics in Applied Physics

Sputtering by Particle Bombardment

Experiments and Computer Calculations from Threshold to MeV Energies

Editors: Behrisch, Rainer, Eckstein, Wolfgang (Eds.)

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  • State-of-the-art report covering theoretical as well as experimental aspects of sputtering
  • Offers a critical review of computational methods for calculating sputtering yields
  • Presents new developments such as sputtering by MeV ions
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eBook $219.00
price for USA in USD (gross)
  • ISBN 978-3-540-44502-9
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Hardcover $279.99
price for USA in USD
  • ISBN 978-3-540-44500-5
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  • Usually dispatched within 3 to 5 business days.
Softcover $279.99
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  • ISBN 978-3-642-07944-3
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About this book

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.

Table of contents (7 chapters)

Table of contents (7 chapters)
  • Introduction and Overview

    Pages 1-20

    Behrisch, Rainer (et al.)

  • Computer Simulation of the Sputtering Process

    Pages 21-31

    Eckstein, Wolfgang (et al.)

  • Sputtering Yields

    Pages 33-187

    Eckstein, Wolfgang

  • Results of Molecular Dynamics Calculations

    Pages 189-230

    M. Urbassek, Herbert

  • Energy and Angular Distributions of Sputtered Species

    Pages 231-328

    Gnaser, Hubert

Buy this book

eBook $219.00
price for USA in USD (gross)
  • ISBN 978-3-540-44502-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $279.99
price for USA in USD
  • ISBN 978-3-540-44500-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $279.99
price for USA in USD
  • ISBN 978-3-642-07944-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Sputtering by Particle Bombardment
Book Subtitle
Experiments and Computer Calculations from Threshold to MeV Energies
Editors
  • Rainer Behrisch
  • Wolfgang Eckstein
Series Title
Topics in Applied Physics
Series Volume
110
Copyright
2007
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-540-44502-9
DOI
10.1007/978-3-540-44502-9
Hardcover ISBN
978-3-540-44500-5
Softcover ISBN
978-3-642-07944-3
Series ISSN
0303-4216
Edition Number
1
Number of Pages
XVII, 509
Topics