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Nanoscale Spectroscopy and Its Applications to Semiconductor Research

  • Conference proceedings
  • © 2002

Overview

Part of the book series: Lecture Notes in Physics (LNP, volume 588)

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Table of contents (27 papers)

Keywords

About this book

Fabrication technologies for nanostructured devices have been developed recently, and the electrical and optical properties of such nanostructures are a subject of advanced research.
This book describes the different approaches to spectroscopic microscopy, i.e., Electron Beam Probe Spectroscopy, Spectroscopic Photoelectron Microscopy, and Scanning Probe Spectroscopy. It will be useful as a compact source of reference for the experienced reseracher, taking into account at the same time the needs of postgraduate students and nonspecialist researchers by using a tutorial approach throughout.

Reviews

"This is an unusual collection and the vast audience of workers on semiconductor structure will want to have access to it." (Ultramicroscopy, 99, 2004)

Editors and Affiliations

  • NTT Basic Research Laboratories, Atsugi-shi Kanagawa, Japan

    Yoshio Watanabe

  • Istituto MASPEC, Parma, Italy

    Giancarlo Salviati

  • Sincrotrone Trieste, Trieste, Italy

    Stefan Heun

  • Tokyo Institute of Technology, Tokyo, Japan

    Naoki Yamamoto

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