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Micromanufacturing and Nanotechnology

Authors: Mahalik, Nitaigour P.

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eBook $139.00
price for USA in USD (gross)
  • ISBN 978-3-540-29339-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
  • ISBN 978-3-540-25377-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.99
price for USA in USD
  • ISBN 978-3-642-06476-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

Table of contents (20 chapters)

  • Introduction

    Mahalik, N. P.

    Pages 1-18

  • Principles of MEMS and MOEMS

    Mahalik, N. P. (et al.)

    Pages 19-44

  • Laser Technology in Micromanufacturing

    Jeong, Sungho

    Pages 45-61

  • Soft Geometrical Error Compensation Methods Using Laser Interferometer

    Tan, K. K. (et al.)

    Pages 63-81

  • Characterising Etching Processes in Bulk Micromachining

    Bag, S. K.

    Pages 83-105

Buy this book

eBook $139.00
price for USA in USD (gross)
  • ISBN 978-3-540-29339-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
  • ISBN 978-3-540-25377-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.99
price for USA in USD
  • ISBN 978-3-642-06476-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Micromanufacturing and Nanotechnology
Authors
Copyright
2006
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-540-29339-2
DOI
10.1007/3-540-29339-6
Hardcover ISBN
978-3-540-25377-8
Softcover ISBN
978-3-642-06476-0
Edition Number
1
Number of Pages
XXIII, 468
Topics