Excimer Laser Technology

Editors: Basting, Dirk, Marowsky, Gerd (Eds.)

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About this book

 This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F laser technology. 

Additional chapters on optics, devices and laser systems complete this compact handbook.

A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

Reviews

From the reviews:

"This book is one of the few books devoted to excimer lasers and their applications. … anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)


Table of contents (31 chapters)

Table of contents (31 chapters)
  • Introductory Remarks

    Pages 1-7

    Basting, D. (et al.)

  • Historical Review of Excimer Laser Development

    Pages 8-21

    Basting, D. (et al.)

  • Trends in Worldwide Excimer Laser Sales

    Pages 22-29

    Anderson, Stephen G.

  • Some Fundamentals of Laser Physics

    Pages 33-40

    Körber, K. (et al.)

  • Principles of Excimer Lasers

    Pages 41-45

    Bergmann, H. (et al.)

Buy this book

eBook $149.00
price for USA in USD
  • ISBN 978-3-540-26667-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $279.99
price for USA in USD
  • ISBN 978-3-540-20056-7
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
Softcover $199.99
price for USA in USD
  • ISBN 978-3-642-05749-6
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
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Bibliographic Information

Bibliographic Information
Book Title
Excimer Laser Technology
Editors
  • Dirk Basting
  • Gerd Marowsky
Copyright
2005
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-540-26667-9
DOI
10.1007/b137894
Hardcover ISBN
978-3-540-20056-7
Softcover ISBN
978-3-642-05749-6
Edition Number
1
Number of Pages
XX, 433
Topics