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Mikroelektronik

Prozeßtechnologie

Fertigungsverfahren für integrierte MOS-Schaltungen

Authors: Schumicki, Günter, Seegebrecht, Peter

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eBook $49.99
price for USA in USD (gross)
  • ISBN 978-3-662-09540-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $89.99
price for USA in USD
  • ISBN 978-3-540-17670-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.

Table of contents (16 chapters)

Buy this book

eBook $49.99
price for USA in USD (gross)
  • ISBN 978-3-662-09540-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $89.99
price for USA in USD
  • ISBN 978-3-540-17670-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Prozeßtechnologie
Book Subtitle
Fertigungsverfahren für integrierte MOS-Schaltungen
Authors
Series Title
Mikroelektronik
Copyright
1991
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-662-09540-9
DOI
10.1007/978-3-662-09540-9
Softcover ISBN
978-3-540-17670-1
Series ISSN
1431-6021
Edition Number
1
Number of Pages
XVI, 500
Number of Illustrations and Tables
168 b/w illustrations
Topics