Overview
- Nanotechnology is one of the key technologies of the 20th century.
- After intense basic and applied research, it is going to be established in industry.
- The techniques presented in this book are important with respect to future manufacturing.
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (8 chapters)
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Front Matter
Keywords
About this book
This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.
Editors and Affiliations
Bibliographic Information
Book Title: Micromachines as Tools for Nanotechnology
Editors: Hiroyuki Fujita
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/978-3-642-55503-9
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2003
Hardcover ISBN: 978-3-540-00856-9Published: 11 July 2003
Softcover ISBN: 978-3-642-62465-0Published: 29 October 2012
eBook ISBN: 978-3-642-55503-9Published: 06 December 2012
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: XII, 211
Topics: Nanotechnology, Condensed Matter Physics, Engineering, general, Manufacturing, Machines, Tools, Processes, Electronics and Microelectronics, Instrumentation