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Microtechnology and MEMS

Micromachines as Tools for Nanotechnology

Editors: Fujita, Hiroyuki (Ed.)

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eBook $139.00
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  • ISBN 978-3-642-55503-9
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Hardcover $199.99
price for USA in USD
  • ISBN 978-3-540-00856-9
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Softcover $179.99
price for USA in USD
  • ISBN 978-3-642-62465-0
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  • Institutional customers should get in touch with their account manager
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About this book

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.

Table of contents (8 chapters)

Table of contents (8 chapters)

Buy this book

eBook $139.00
price for USA in USD
  • ISBN 978-3-642-55503-9
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $199.99
price for USA in USD
  • ISBN 978-3-540-00856-9
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
Softcover $179.99
price for USA in USD
  • ISBN 978-3-642-62465-0
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
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Bibliographic Information

Bibliographic Information
Book Title
Micromachines as Tools for Nanotechnology
Editors
  • Hiroyuki Fujita
Series Title
Microtechnology and MEMS
Copyright
2003
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-55503-9
DOI
10.1007/978-3-642-55503-9
Hardcover ISBN
978-3-540-00856-9
Softcover ISBN
978-3-642-62465-0
Series ISSN
1615-8326
Edition Number
1
Number of Pages
XII, 211
Topics