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Springer Tracts in Modern Physics

Electron-Beam Interactions with Solids

Application of the Monte Carlo Method to Electron Scattering Problems

Authors: Dapor, Maurizio

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About this book

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook $139.00
price for USA in USD (gross)
  • ISBN 978-3-540-36507-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
  • ISBN 978-3-540-00652-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.99
price for USA in USD
  • ISBN 978-3-642-05623-9
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Electron-Beam Interactions with Solids
Book Subtitle
Application of the Monte Carlo Method to Electron Scattering Problems
Authors
Series Title
Springer Tracts in Modern Physics
Series Volume
186
Copyright
2003
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-540-36507-5
DOI
10.1007/3-540-36507-9
Hardcover ISBN
978-3-540-00652-7
Softcover ISBN
978-3-642-05623-9
Series ISSN
0081-3869
Edition Number
1
Number of Pages
X, 110
Topics