Overview
- Offers an essential survey of controlling defects in semiconductor devices
- Discusses different metals and important processing technologies in semiconductor devices
- Discusses the interest in (Si)Ge for advanced complementary metal-oxide semiconductors (CMOS) and the effects of metals on SiGe-based devices and materials
Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 270)
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Table of contents (9 chapters)
Keywords
About this book
The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Authors and Affiliations
About the authors
Within the Electrochemical Society, he was the Chair of the Electronics & Photonics Division from 2001 to 2003. In 2004, he received the Electronics and Photonics Division Award. In 2016 he received the Semi China Special Recognition Award for outstanding involvement in the China Semiconductor Technology International Conference (CSTIC).
Eddy Simoen obtained his Bachelor’s (1976–1978) and Master’s degrees in Physics Engineering (1978–1980), as well as his Ph.D. in Engineering (1985), from Ghent University (Belgium). He is currently a Specialist at imec (Leuven, Belgium), involved in the study of defect and strainengineering in high-mobility and epitaxial substrates and defect studies in germanium and III–V compounds (AlN; GaN, InP, etc). Another current focus point is the study of 1-transistor memories based on bulk FinFET and Ultra-thin Buried Oxide (UTBOX) Silicon-on-Insulator (SOI), using low-frequency noise. In 2013, he was appointed a part-time Professor at Ghent University. He is a member of the IEEE and ECS and became an ECS Fellow in 2016.
In these fields, he has (co-) authored over 1500 Journal and Conference papers, 12 book chapters and a monograph on Radiation Effects in Advanced Semiconductor Devices and Materials (Springer, 2002). He was also a co-editor of the book on Germanium-based Technologies – from Materials to Devices (Elsevier March 2007; Chinese translation 2010). Another book on the “Fundamental and Technological Aspects of Extended Defects in Germanium” was published by Springer in January 2009. In 2016 he published “Random Telegraph Signals in Semiconductor Devices” with IOP. He is also a co-inventor of two patents.
Bibliographic Information
Book Title: Metal Impurities in Silicon- and Germanium-Based Technologies
Book Subtitle: Origin, Characterization, Control, and Device Impact
Authors: Cor Claeys, Eddy Simoen
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-319-93925-4
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer International Publishing AG, part of Springer Nature 2018
Hardcover ISBN: 978-3-319-93924-7Published: 22 August 2018
Softcover ISBN: 978-3-030-06747-2Published: 30 January 2019
eBook ISBN: 978-3-319-93925-4Published: 13 August 2018
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 1
Number of Pages: XXXIII, 438
Number of Illustrations: 8 b/w illustrations, 207 illustrations in colour
Topics: Optical and Electronic Materials, Microwaves, RF and Optical Engineering, Semiconductors, Electronic Circuits and Devices, Characterization and Evaluation of Materials