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NanoScience and Technology

Helium Ion Microscopy

Editors: Hlawacek, Gregor, Gölzhäuser, Armin (Eds.)

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  • Written by the leading professionals in the field
  • Highlights the basic physics as well as the technological aspects of the instrument
  • Presents the relevant theoretical models and the corresponding software packages
  • Describes real applications of the technique
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eBook $119.00
price for USA in USD
  • ISBN 978-3-319-41990-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
Softcover $159.99
price for USA in USD
About this book

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

Table of contents (19 chapters)

Table of contents (19 chapters)

Buy this book

eBook $119.00
price for USA in USD
  • ISBN 978-3-319-41990-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
Softcover $159.99
price for USA in USD
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Bibliographic Information

Bibliographic Information
Book Title
Helium Ion Microscopy
Editors
  • Gregor Hlawacek
  • Armin Gölzhäuser
Series Title
NanoScience and Technology
Copyright
2016
Publisher
Springer International Publishing
Copyright Holder
Springer International Publishing Switzerland
eBook ISBN
978-3-319-41990-9
DOI
10.1007/978-3-319-41990-9
Hardcover ISBN
978-3-319-41988-6
Softcover ISBN
978-3-319-82473-4
Series ISSN
1434-4904
Edition Number
1
Number of Pages
XXIII, 526
Number of Illustrations
116 b/w illustrations, 204 illustrations in colour
Topics