Overview
- Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators
- Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators
- Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs
- Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation
- Includes supplementary material: sn.pub/extras
Part of the book series: Microsystems and Nanosystems (MICRONANO)
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Table of contents (16 chapters)
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Materials for Piezoelectric MEMS Resonators
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Design of Piezoelectric MEMS Resonators
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Manufacturing and Reliability of Piezoelectric MEMS Resonators
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Real World Implementations
Keywords
About this book
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
Editors and Affiliations
About the editors
Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.
Bibliographic Information
Book Title: Piezoelectric MEMS Resonators
Editors: Harmeet Bhugra, Gianluca Piazza
Series Title: Microsystems and Nanosystems
DOI: https://doi.org/10.1007/978-3-319-28688-4
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2017
Hardcover ISBN: 978-3-319-28686-0Published: 18 January 2017
Softcover ISBN: 978-3-319-80405-7Published: 12 July 2018
eBook ISBN: 978-3-319-28688-4Published: 09 January 2017
Series ISSN: 2198-0063
Series E-ISSN: 2198-0071
Edition Number: 1
Number of Pages: XII, 424
Number of Illustrations: 104 b/w illustrations, 127 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Nanotechnology and Microengineering, Nanotechnology, Optical and Electronic Materials