Microsystems and Nanosystems

Piezoelectric MEMS Resonators

Editors: Bhugra, Harmeet, Piazza, Gianluca (Eds.)

  • Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators
  • Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators
  • Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs
  • Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation
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eBook 118,99 €
price for Spain (gross)
  • ISBN 978-3-319-28688-4
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 155,99 €
price for Spain (gross)
  • ISBN 978-3-319-28686-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
About this book

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:

  • Widely-used piezoelectric materials, as well as materials in which there is emerging interest
  • Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
  • Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
  • Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
  • ...and more!
The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

About the authors

Harmeet "Mitu" Bhugra lead the development of the world's first PiezoElectric MEMS timing and sensor products at IDT. He holds 22 US patents and has published multiple technical papers and given multiple talks on MEMS technology.

Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.

Table of contents (16 chapters)

  • AlN Thin Film Processing and Basic Properties

    Muralt, Paul

    Pages 3-37

    Preview Buy Chapter 30,19 €
  • Lead Zirconate Titanate (PZT) for M/NEMS

    Polcawich, Ronald G. (et al.)

    Pages 39-71

    Preview Buy Chapter 30,19 €
  • Gallium Nitride for M/NEMS

    Rais-Zadeh, Mina (et al.)

    Pages 73-98

    Preview Buy Chapter 30,19 €
  • Lithium Niobate for M/NEMS Resonators

    Gong, Songbin

    Pages 99-129

    Preview Buy Chapter 30,19 €
  • Quality Factor and Coupling in Piezoelectric MEMS Resonators

    Abdolvand, Reza (et al.)

    Pages 133-152

    Preview Buy Chapter 30,19 €

Buy this book

eBook 118,99 €
price for Spain (gross)
  • ISBN 978-3-319-28688-4
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 155,99 €
price for Spain (gross)
  • ISBN 978-3-319-28686-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Piezoelectric MEMS Resonators
Editors
  • Harmeet Bhugra
  • Gianluca Piazza
Series Title
Microsystems and Nanosystems
Copyright
2017
Publisher
Springer International Publishing
Copyright Holder
Springer International Publishing Switzerland
eBook ISBN
978-3-319-28688-4
DOI
10.1007/978-3-319-28688-4
Hardcover ISBN
978-3-319-28686-0
Series ISSN
2198-0063
Edition Number
1
Number of Pages
XII, 424
Number of Illustrations and Tables
104 b/w illustrations, 127 illustrations in colour
Topics