Chemical Solution Deposition of Functional Oxide Thin Films
Editors: Schneller, T., Waser, R., Kosec, M., Payne, D. (Eds.)
Free Preview- Examines all aspects of Chemical Solution Deposition (CSD) of functional oxide thin films
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- About this book
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This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.
- Table of contents (29 chapters)
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Simple Alkoxide Based Precursor Systems
Pages 3-28
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Carboxylate Based Precursor Systems
Pages 29-49
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Mixed Metallo-organic Precursor Systems
Pages 51-69
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Single Source Precursor Approach
Pages 71-92
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Aqueous Precursor Systems
Pages 93-140
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Table of contents (29 chapters)
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Bibliographic Information
- Bibliographic Information
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- Book Title
- Chemical Solution Deposition of Functional Oxide Thin Films
- Editors
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- Theodor Schneller
- Rainer Waser
- Marija Kosec
- David Payne
- Copyright
- 2013
- Publisher
- Springer-Verlag Wien
- Copyright Holder
- Springer-Verlag Wien
- eBook ISBN
- 978-3-211-99311-8
- DOI
- 10.1007/978-3-211-99311-8
- Hardcover ISBN
- 978-3-211-99310-1
- Softcover ISBN
- 978-3-7091-1915-0
- Edition Number
- 1
- Number of Pages
- XVII, 796
- Number of Illustrations
- 257 b/w illustrations, 133 illustrations in colour
- Topics
