Simulation of Semiconductor Processes and Devices 2001

SISPAD 01

Editors: Tsoukalas, Dimitris, Tsamis, Christos (Eds.)

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About this book

This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5–7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models describing basic physical phenomena involved. New simulation tools are developed to complete the hierarchy in the Technology Computer Aided Design simulation chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices.

Table of contents (49 chapters)

  • Macroscopic Quantum Carrier Transport Modeling

    Yu, Zhiping (et al.)

    Pages 1-9

  • Atomistic Front-End Process Modelling: A Powerful Tool for Deep-Submicron Device Fabrication

    Jaraiz, M. (et al.)

    Pages 10-17

  • Monte Carlo Impurity Diffusion Simulation Considering Charged Species

    Hane, Masami (et al.)

    Pages 18-21

  • A Novel Model for Boron Diffusion in SiGe Strained Layers Based on a Kinetics Driven Ge-B Pairing Mechanism

    Villanueva, D. (et al.)

    Pages 22-25

  • The Role of Incomplete Interstitial-Vacancy Recombination on Silicon Amorphization

    Marqués, Luis A. (et al.)

    Pages 26-29

Buy this book

eBook $129.00
price for USA in USD (gross)
  • ISBN 978-3-7091-6244-6
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $229.99
price for USA in USD
  • ISBN 978-3-211-83708-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $169.99
price for USA in USD
  • ISBN 978-3-7091-7278-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Simulation of Semiconductor Processes and Devices 2001
Book Subtitle
SISPAD 01
Editors
  • Dimitris Tsoukalas
  • Christos Tsamis
Copyright
2001
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag Wien
eBook ISBN
978-3-7091-6244-6
DOI
10.1007/978-3-7091-6244-6
Hardcover ISBN
978-3-211-83708-5
Softcover ISBN
978-3-7091-7278-0
Edition Number
1
Number of Pages
XV, 455
Topics