Simulation of Semiconductor Processes and Devices 1998

SISPAD 98

Editors: Meyer, Kristin De, Biesemans, Serge (Eds.)

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  • ISBN 978-3-7091-6827-1
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Hardcover $259.00
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Softcover $169.00
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  • ISBN 978-3-7091-7415-9
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About this book

This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)

Table of contents (49 chapters)

  • TCAD at the SRC

    Goossens, R.

    Pages 1-2

  • TCAD in Selete

    Kotani, Norihiko

    Pages 3-7

  • Integration of Lithography and Etch Simulations

    Krivokapic, Z. (et al.)

    Pages 8-11

  • Integrated Three-Dimensional Topography Simulation and its Application to Dual-Damascene Processing

    Bär, E. (et al.)

    Pages 12-15

  • Efficient Algorithms for Three-Dimensional Etching and Deposition Simulation

    Pyka, W. (et al.)

    Pages 16-19

Buy this book

eBook $129.00
price for USA in USD (gross)
  • ISBN 978-3-7091-6827-1
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $259.00
price for USA in USD
  • ISBN 978-3-211-83208-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $169.00
price for USA in USD
  • ISBN 978-3-7091-7415-9
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Simulation of Semiconductor Processes and Devices 1998
Book Subtitle
SISPAD 98
Editors
  • Kristin De Meyer
  • Serge Biesemans
Copyright
1998
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag/Wien
eBook ISBN
978-3-7091-6827-1
DOI
10.1007/978-3-7091-6827-1
Hardcover ISBN
978-3-211-83208-0
Softcover ISBN
978-3-7091-7415-9
Edition Number
1
Number of Pages
XIV, 410
Topics