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Springer Theses

Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

Authors: Montero, Daniel

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  • Nominated as an outstanding Ph.D. thesis by the  Universidad Complutense de Madrid, Madrid, Spain
  • Provides basic research in a novel material based on silicon, which is later integrated into an industrial CMOS Image Sensor prototype
  • Presents a methodology to combine two fast, non-destructive and reliable techniques to quickly identify the fast melting and solidification regimes after a nanosecond laser process
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eBook $129.00
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  • ISBN 978-3-030-63826-9
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About this book

This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.

About the authors

Daniel Montero was born in Guadalajara (Spain) in 1990. His passion for nature and technology, inherited from his mother and father respectively, led him to pursue a Physics degree at Complutense University of Madrid. He later got at the same university a Masters Degree in Renewable energies, and finally the PhD in Physics with European and Cum Laude special mentions. Recently, he joined IMEC in Belgium to continue his professional career as R&D Engineer in Plasma Etch. 

Table of contents (7 chapters)

Table of contents (7 chapters)

Buy this book

eBook $129.00
price for USA in USD
  • ISBN 978-3-030-63826-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $169.99
price for USA in USD
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Bibliographic Information

Bibliographic Information
Book Title
Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals
Authors
Series Title
Springer Theses
Copyright
2021
Publisher
Springer International Publishing
Copyright Holder
The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG
eBook ISBN
978-3-030-63826-9
DOI
10.1007/978-3-030-63826-9
Hardcover ISBN
978-3-030-63825-2
Series ISSN
2190-5053
Edition Number
1
Number of Pages
XXXVI, 230
Number of Illustrations
13 b/w illustrations, 124 illustrations in colour
Topics