Authors:
- Nominated as an outstanding Ph.D. thesis by the Universidad Complutense de Madrid, Madrid, Spain
- Provides basic research in a novel material based on silicon, which is later integrated into an industrial CMOS Image Sensor prototype
- Presents a methodology to combine two fast, non-destructive and reliable techniques to quickly identify the fast melting and solidification regimes after a nanosecond laser process
Part of the book series: Springer Theses (Springer Theses)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.
Authors and Affiliations
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Facultad de Ciencias Físicas, Universidad Complutense de Madrid, Madrid, Spain
Daniel Montero Álvarez
About the author
Bibliographic Information
Book Title: Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals
Authors: Daniel Montero Álvarez
Series Title: Springer Theses
DOI: https://doi.org/10.1007/978-3-030-63826-9
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2021
Hardcover ISBN: 978-3-030-63825-2Published: 09 January 2021
Softcover ISBN: 978-3-030-63828-3Published: 09 January 2022
eBook ISBN: 978-3-030-63826-9Published: 08 January 2021
Series ISSN: 2190-5053
Series E-ISSN: 2190-5061
Edition Number: 1
Number of Pages: XXXVI, 230
Number of Illustrations: 13 b/w illustrations, 124 illustrations in colour
Topics: Optical and Electronic Materials, Analytical Chemistry, Materials Science, general, Chemistry/Food Science, general