Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals
Authors: Montero, Daniel
Free Preview- Nominated as an outstanding Ph.D. thesis by the Universidad Complutense de Madrid, Madrid, Spain
- Provides basic research in a novel material based on silicon, which is later integrated into an industrial CMOS Image Sensor prototype
- Presents a methodology to combine two fast, non-destructive and reliable techniques to quickly identify the fast melting and solidification regimes after a nanosecond laser process
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- About this book
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This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.
- About the authors
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Daniel Montero was born in Guadalajara (Spain) in 1990. His passion for nature and technology, inherited from his mother and father respectively, led him to pursue a Physics degree at Complutense University of Madrid. He later got at the same university a Masters Degree in Renewable energies, and finally the PhD in Physics with European and Cum Laude special mentions. Recently, he joined IMEC in Belgium to continue his professional career as R&D Engineer in Plasma Etch.
- Table of contents (7 chapters)
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Introduction
Pages 1-18
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Experimental Techniques
Pages 19-64
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Results: NLA Using a Short Pulse Duration KrF Laser
Pages 65-110
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Results: NLA Using a Long Pulse Duration XeCl Laser
Pages 111-162
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Results: Integrating the Supersaturated Material in a CMOS Pixel Matrix
Pages 163-201
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Table of contents (7 chapters)
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Bibliographic Information
- Bibliographic Information
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- Book Title
- Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals
- Authors
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- Daniel Montero
- Series Title
- Springer Theses
- Copyright
- 2021
- Publisher
- Springer International Publishing
- Copyright Holder
- The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG
- eBook ISBN
- 978-3-030-63826-9
- DOI
- 10.1007/978-3-030-63826-9
- Hardcover ISBN
- 978-3-030-63825-2
- Series ISSN
- 2190-5053
- Edition Number
- 1
- Number of Pages
- XXXVI, 230
- Number of Illustrations
- 13 b/w illustrations, 124 illustrations in colour
- Topics
