Process Variations in Microsystems Manufacturing

1. Front Matter

   Pages i-xix

   PDF

2. Introduction

   • Michael Huff

   Pages 1-8

3. An Overview of MEMS Microsystems

   • Michael Huff

   Pages 9-44

4. Microsystems Manufacturing Methods: Integrated Circuit Processing Steps

   • Michael Huff

   Pages 45-97

5. Microsystems Manufacturing Methods: MEMS Processes

   • Michael Huff

   Pages 99-171

6. Metrology for Microsystems Manufacturing

   • Michael Huff

   Pages 173-225

7. Microsystems Material Properties

   • Michael Huff

   Pages 227-273

8. Microsystems Process Integration, Testing, and Packaging

   • Michael Huff

   Pages 275-311

9. Device Parameter Variations in Microsystems Manufacturing

   • Michael Huff

   Pages 313-387

10. Yield Analysis and Quality Assurance and Control Methods Used in Microsystems Manufacturing

    • Michael Huff

    Pages 389-446

11. Managing Parameter Variations in Microsystems Device Design

    • Michael Huff

    Pages 447-507

12. Back Matter

    Pages 509-521

    PDF

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

• MEMS
• Micro-Electro-Mechanical Systems
• Micro-machining
• Microactuators
• Microsensors
• Microsystems
• Microsystems Design
• Microsystems Manufacturing
• Microsystems Manufacturing

• Corporation for National Research Initiatives, MEMS & Nanotechnology Exchange, Reston, USA

  Michael Huff

Michael A. Huff, Ph.D., is Founder and Director of the MEMS & Nanotechnology Exchange (MNX) in Reston, Virginia. The MNX was established as a national-level program to provide access to MEMS implementation resources as well as to develop manufacturing techniques to help advance the technology. Dr. Huff has actively participated in MEMS research and development for over twenty-five years, has published numerous papers on MEMS devices and fabrication technologies, and holds more than a dozen patents and has several others pending. He has held a variety of notable positions, from industry to academia. Prior to establishing the MNX, Dr. Huff was on the faculty in the Department of Electrical Engineering at Case Western Reserve University (CWRU) in Cleveland, Ohio. Before joining the faculty at CWRU, he held the position of Technical Fellow at the Baxter Healthcare Corporation and directed Baxter's corporate-wide efforts in applying MEMS technology to novel medical devices. Dr.Huff received an M.S. in Electrical Engineering and Computer Science and simultaneously the M.S. in Material Science and Engineering with a specialization in Electronic Materials and a Ph.D. in Electrical Engineering and Computer Science from the Massachusetts Institute of Technology. 

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