Overview
- Offers advice on the advantages and disadvantages of various optical and non-optical metrology techniques in different situations
- Describes best practice and gives genuine real-world examples and case studies
- Includes achievable numbers for resolutions and reproducibility for each technique
Part of the book series: Springer Series in Measurement Science and Technology (SSMST)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
Keywords
- Practical surface measurement
- Practical surface characterisation
- Surface optical metrology
- Scanning nearfield optical microscopy
- White light interferometry
- Confocal optical profiling
- Light sectional methods
- Multi-wavelength interferometry
- Grazing incidence interferometry
- Shearing interferometry
- Digital holographic microscopy
- Elastic light scattering
- Spectral Reflectometry and Ellipsometry
About this book
This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.
Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry andellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).The book provides:
- Overview of the working principles
- Description of advantages and disadvantages
- Currently achievable numbers for resolutions, repeatability, and reproducibility
- Examples of real-world applications
A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.
Authors and Affiliations
About the author
Bibliographic Information
Book Title: A Practical Guide to Surface Metrology
Authors: Michael Quinten
Series Title: Springer Series in Measurement Science and Technology
DOI: https://doi.org/10.1007/978-3-030-29454-0
Publisher: Springer Cham
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2019
Hardcover ISBN: 978-3-030-29453-3Published: 02 January 2020
Softcover ISBN: 978-3-030-29456-4Published: 26 August 2021
eBook ISBN: 978-3-030-29454-0Published: 01 January 2020
Series ISSN: 2198-7807
Series E-ISSN: 2198-7815
Edition Number: 1
Number of Pages: XXV, 230
Number of Illustrations: 56 b/w illustrations, 100 illustrations in colour
Topics: Measurement Science and Instrumentation, Characterization and Evaluation of Materials, Surface and Interface Science, Thin Films, Surfaces and Interfaces, Thin Films, Materials Engineering, Optics, Lasers, Photonics, Optical Devices