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  • © 2019

Mechanical Properties of Silicon Based Compounds: Silicides

Authors:

  • Focus on the mechanical properties of silicides
  • Presents the fabrication process for bulk silicides and thin films
  • Special chapter on deformation in nano silicides

Part of the book series: Engineering Materials (ENG.MAT.)

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Table of contents (14 chapters)

  1. Front Matter

    Pages i-xvi
  2. What Are the Silicides?

    • Joshua Pelleg
    Pages 1-3
  3. Structure

    • Joshua Pelleg
    Pages 5-12
  4. Fabrication

    • Joshua Pelleg
    Pages 13-16
  5. Testing-Deformation

    • Joshua Pelleg
    Pages 17-68
  6. Dislocations in Silicides

    • Joshua Pelleg
    Pages 69-105
  7. Fatigue in Silicide Composites

    • Joshua Pelleg
    Pages 123-138
  8. Fracture in Silicides

    • Joshua Pelleg
    Pages 139-154
  9. Deformation in Nano Silicides

    • Joshua Pelleg
    Pages 155-162
  10. The Effect of B

    • Joshua Pelleg
    Pages 163-181
  11. Silicide Composites

    • Joshua Pelleg
    Pages 183-210
  12. Alloying in Silicides

    • Joshua Pelleg
    Pages 211-242
  13. Grain Size Effect on Mechanical Properties

    • Joshua Pelleg
    Pages 243-254
  14. Environmental Effect

    • Joshua Pelleg
    Pages 255-272
  15. Back Matter

    Pages 273-274

About this book

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

Authors and Affiliations

  • Department of Materials Engineering, Ben-Gurion University of the Negev, Beer Sheva, Israel

    Joshua Pelleg

About the author

Joshua Pelleg received his B.Sc. in Chemical Engineering at the Technion—Institute of Technology, Haifa, Israel; a M.Sc. in Metallurgy at the Illinois Institute of Technology, Chicago, IL and a Ph.D. in Metallurgy at the University of Wisconsin, Madison, WI. He has been in the BenGurion University of the Negev (BGU) Materials Engineering Department in BeerSheva, Israel since 1970, and was among the founders of the department, and served as its second chairman. Professor Pelleg was the recipient of the Samuel Ayrton Chair in Metallurgy. He specializes in the mechanical properties of materials and the diffusion and defects in solids. He has chaired several university committees and served four terms as the Chairman of Advanced Studies at BenGurion University of the Negev. Prior to his work at BGU, Pelleg acted as Assistant Professor and then Associate Professor in the Department of Materials and Metallurgy at the University of Kansas, Lawrence, KS. Professor Pelleg was also a Visiting Professor: in the Department of Metallurgy at Iowa State University; at the Institute for Atomic Research, US Atomic Energy Commission, Ames, IA; at McGill University, Montreal, QC; at the Tokyo Institute of Technology, Applied Electronics Department, Yokohama, Japan; and in Curtin University, Department of Physics, Perth, Australia. His nonacademic research and industrial experience includes: Chief Metallurgist in Urdan Metallurgical Works Ltd., Netanyah, Israel; Research Engineer in International Harvester Manufacturing Research, Chicago, IL; Associate Research Officer for the National Research Council of Canada, Structures and Materials, National Aeronautical Establishment, Ottawa, ON; Physics Senior Research Scientist, Nuclear Research Center, BeerSheva, Israel; Materials Science Division, Argonne National Labs, Argonne, IL; Atomic Energy ofCanada, Chalk River, ON; Visiting Scientist, CSIR, National Accelerator Centre, Van de Graaf Group Faure, South Africa; Bell Laboratories, Murray Hill, NJ; and GTE Laboratories, Waltham, MA. His current research interests are diffusion in solids, thin film deposition and properties (mostly by sputtering) and the characterization of thin films, among them various silicides.

Bibliographic Information

Buy it now

Buying options

eBook USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access