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Auger Electron Spectroscopy Reference Manual

A Book of Standard Spectra for Identification and Interpretation of Auger Electron Spectroscopy Data

Authors: McGuire, G.

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About this book

Auger electron spectroscopy (AES) is based on the Auger total secondary electron energy distribution, and an ion gun to process, which involves the core-level ionization of an atom with provide depth profiling capability. subsequent deexcitation occurring by an outer-level electron de­ The high surface sensitivity of Auger spectroscopy which dictates caying to fill the core hole. The excess energy is transferred to the need for an ultrahigh-vacuum system is due to the limited and causes the ejection of another electron, which is by definition mean free path of electrons in the 0-3000 e V kinetic energy an Auger electron. The Auger electron transition, denoted by range. The Auger peaks decay exponentially with overlayer cov­ the electron levels involved, is independent of the excitation erage, which is consistent with an exponential dependence of source and leaves the atom with a constant kinetic energy. The escape probability on the depth of the parent atom. A compila­ kinetic energy is given by the differences in binding energies for tion of data from a variety of sources has been used to generate the three levels (for example, EK-E L, - EL ) minus a correction 2 an escape depth curve which falls in the range of 5-30 A in the term for the work function and electron wave function relaxation. energy range from 0 to 3000 eV. The observed escape depth does When the Auger transition occurs within a few angstroms of the not show a strong dependence on the matrix.

Table of contents (43 chapters)

Buy this book

eBook $84.99
price for USA in USD (gross)
  • ISBN 978-1-4757-1702-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $109.99
price for USA in USD
  • ISBN 978-1-4757-1704-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Auger Electron Spectroscopy Reference Manual
Book Subtitle
A Book of Standard Spectra for Identification and Interpretation of Auger Electron Spectroscopy Data
Authors
Copyright
1979
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4757-1702-0
DOI
10.1007/978-1-4757-1702-0
Softcover ISBN
978-1-4757-1704-4
Edition Number
1
Number of Pages
IX, 135
Topics