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Nato Science Series B:

Nondestructive Evaluation of Semiconductor Materials and Devices

Editors: Zemel, Jay N (Ed.)

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About this book

From September 19-29, a NATO Advanced Study Institute on Non­ destructive Evaluation of Semiconductor Materials and Devices was held at the Villa Tuscolano in Frascati, Italy. A total of 80 attendees and lecturers participated in the program which covered many of the important topics in this field. The subject matter was divided to emphasize the following different types of problems: electrical measurements; acoustic measurements; scanning techniques; optical methods; backscatter methods; x-ray observations; accele­ rated life tests. It would be difficult to give a full discussion of such an Institute without going through the major points of each speaker. Clearly this is the proper task of the eventual readers of these Proceedings. Instead, it would be preferable to stress some general issues. What came through very clearly is that the measurements of the basic scientists in materials and device phenomena are of sub­ stantial immediate concern to the device technologies and end users.

Table of contents (14 chapters)

  • Two-Probe (Spreading Resistance) Measurements for Evaluation of Semiconductor Materials and Devices

    Ehrstein, James R.

    Pages 1-66

  • Four-Terminal Nondestructive Electrical and Galvanomagnetic Measurements

    Weider, H. H.

    Pages 67-104

  • Characterization of Surface States at the Si-SiO2 Interface

    DeClerck, G.

    Pages 105-148

  • Steady-State and Non-Steady-State Characterization of MOS Devices

    Simmons, John G.

    Pages 149-199

  • Semiconductor Material Evaluation by Means of Schottky Contacts

    Heime, Klaus

    Pages 201-256

Buy this book

eBook $74.99
price for USA in USD (gross)
  • ISBN 978-1-4757-1352-7
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $99.00
price for USA in USD
  • ISBN 978-1-4757-1354-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Nondestructive Evaluation of Semiconductor Materials and Devices
Editors
  • Jay N Zemel
Series Title
Nato Science Series B:
Series Volume
46
Copyright
1979
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4757-1352-7
DOI
10.1007/978-1-4757-1352-7
Softcover ISBN
978-1-4757-1354-1
Series ISSN
0258-1221
Edition Number
1
Number of Pages
XI, 782
Topics