Physics of Submicron Devices

1. Front Matter

   Pages i-xiii

   PDF

2. An Introductory Review

   • David K. Ferry, Robert O. Grondin

   Pages 1-49

3. Fabrication Techniques for Submicron Devices

   • David K. Ferry, Robert O. Grondin

   Pages 51-89

4. Heterojunctions and Interfaces

   • David K. Ferry, Robert O. Grondin

   Pages 91-136

5. Semiclassical Carrier Transport Models

   • David K. Ferry, Robert O. Grondin

   Pages 137-171

6. Transient Hot-Carrier Transport

   • David K. Ferry, Robert O. Grondin

   Pages 173-241

7. Alloys and Superlattices

   • David K. Ferry, Robert O. Grondin

   Pages 243-277

8. The Electron-Electron Interaction

   • David K. Ferry, Robert O. Grondin

   Pages 279-296

9. Lateral Surface Superlattices

   • David K. Ferry, Robert O. Grondin

   Pages 297-313

10. Quantum Transport in Small Structures

    • David K. Ferry, Robert O. Grondin

    Pages 315-362

11. Noise in Submicron Devices

    • David K. Ferry, Robert O. Grondin

    Pages 363-396

12. Back Matter

    Pages 397-402

    PDF

The purposes of this book are many. First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require a much larger volume even without treating the important physics for submicron devices. Rather, the book is written principally to pull together and present in a single place, and in a (hopefully) uniform treatment, much of the understanding on relevant physics for submicron devices. Indeed, the understand­ ing that we are trying to convey through this work has existed in the literature for quite some time, but has not been brought to the full attention of those whose business is the making of submicron devices. It should be remarked that much of the important physics that is discussed here may not be found readily in devices at the 1.0-JLm level, but will be found to be dominant at the O.I-JLm level. The range between these two is rapidly being covered as technology moves from the 256K RAM to the 16M RAM chips.

• RAM
• physics
• superlattice
• technology

• College of Engineering and Applied Science Center for Solid State Electronics Research, Arizona State University, Tempe, USA

  David K. Ferry, Robert O. Grondin

Policies and ethics