Get 40% off of select print and eBooks in Engineering & Materials Science!

Microdevices

Electron and Ion Optics

Authors: Szilagyi, Miklos

Free Preview

Buy this book

eBook $149.00
price for USA in USD (gross)
  • ISBN 978-1-4613-0923-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $199.99
price for USA in USD
  • ISBN 978-1-4612-8247-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten­ ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Table of contents (12 chapters)

Table of contents (12 chapters)

Buy this book

eBook $149.00
price for USA in USD (gross)
  • ISBN 978-1-4613-0923-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $199.99
price for USA in USD
  • ISBN 978-1-4612-8247-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Electron and Ion Optics
Authors
Series Title
Microdevices
Copyright
1988
Publisher
Springer US
Copyright Holder
Plenum Press, New York
eBook ISBN
978-1-4613-0923-9
DOI
10.1007/978-1-4613-0923-9
Softcover ISBN
978-1-4612-8247-1
Edition Number
1
Number of Pages
556
Topics