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Microelectronic Test Structures for CMOS Technology

Authors: Bhushan, Manjul, Ketchen, Mark B.

  • Provides a comprehensive guide to designing the most effective and lowest-cost microelectronic test structures
  • Uses specific examples of good design techniques and discusses common errors to avoid in order to guide readers
  • Presents an integrated approach to multiple parts of the design process, using measurement techniques and statistical analysis combined with physical mapping
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eBook $109.00
price for USA in USD (gross)
  • ISBN 978-1-4419-9377-9
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $159.99
price for USA in USD
  • ISBN 978-1-4419-9376-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $149.99
price for USA in USD
  • ISBN 978-1-4899-9055-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the eBook  
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About this book

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors’ overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology.

Table of contents (10 chapters)

Buy this book

eBook $109.00
price for USA in USD (gross)
  • ISBN 978-1-4419-9377-9
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $159.99
price for USA in USD
  • ISBN 978-1-4419-9376-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $149.99
price for USA in USD
  • ISBN 978-1-4899-9055-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the eBook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Microelectronic Test Structures for CMOS Technology
Authors
Copyright
2011
Publisher
Springer-Verlag New York
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-1-4419-9377-9
DOI
10.1007/978-1-4419-9377-9
Hardcover ISBN
978-1-4419-9376-2
Softcover ISBN
978-1-4899-9055-6
Edition Number
1
Number of Pages
XXXIV, 373
Topics