Authors:
- Presents and discusses elected examples in different applied fields, such as microelectronics, fusion, and aerospace
- Provides detailed descriptions of the state-to-state kinetic approach for benchmark plasma systems through worked examples
- Approaches the subject completely by assessing both fundamental concepts and problems still open in the research community
- Presents the third volume in a series of three about plasma chemistry with a focus on the electron and heavy particle kinetics in non-equilibrium plasmas emphasizing the coupling between the two kinetics
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics (SSAOPP, volume 85)
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Table of contents (12 chapters)
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Front Matter
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Back Matter
About this book
Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.
The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics.To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.
Reviews
“The work will be a valuable resource for researchers using many applications involving nonequilibrium cold plasmas such as plasma beams, etching, cleaning, deposition, surface activation, and gas lasers. … Extensive references are provided, chapter-by-chapter, in addition to useful tables of reactions and processes with descriptions and references. … Summing Up: Recommended. Graduate students, researchers/faculty, and professionals/practitioners.” (T. Eastman, Choice, Vol. 53 (10), June, 2016)
Authors and Affiliations
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Dipartimento di Chimica, University of Bari and CNR, Bari, Italy
Mario Capitelli
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Dipartimento di Ingegneria Civile, Ambientale, del Territorio, Edile e di Chimica (DICATECh), Polytechnic of Bari, Bari, Italy
Roberto Celiberto
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IMIP CNR, Bari, Italy
Gianpiero Colonna, Fabrizio Esposito
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University of Bari and CNR, Bari, Italy
Claudine Gorse, Savino Longo
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Laboratoire des Sciences des Procédés et des Matériaux, CNRS-INSIS, Paris, France
Khaled Hassouni
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Consiglio Nazionale delle Ricerche, Bari, Italy
Annarita Laricchiuta
About the authors
Mario Capitelli, University of Bari, mario.capitelli@ba.imip.cnr.it
Gianpiero Colonna, IMIP CNR
Fabrizio Esposito, IMIP CNR
Khaled Hassouni, Institut Galilee-Univeriste Paris
Annarita Laricchiuta, IMIP CNR
Savino Longo, University of Bari
Bibliographic Information
Book Title: Fundamental Aspects of Plasma Chemical Physics
Book Subtitle: Kinetics
Authors: Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni, Annarita Laricchiuta, … Savino Longo
Series Title: Springer Series on Atomic, Optical, and Plasma Physics
DOI: https://doi.org/10.1007/978-1-4419-8185-1
Publisher: Springer New York, NY
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer New York 2016
Hardcover ISBN: 978-1-4419-8184-4Published: 26 November 2015
Softcover ISBN: 978-1-4939-4163-6Published: 23 August 2016
eBook ISBN: 978-1-4419-8185-1Published: 26 November 2015
Series ISSN: 1615-5653
Series E-ISSN: 2197-6791
Edition Number: 1
Number of Pages: XVI, 318
Topics: Plasma Physics, Physical Chemistry, Theoretical, Mathematical and Computational Physics, Classical Mechanics