Overview
- Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
- Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures
- Provides real world problems related to the dynamics of MEMS that have not been covered in other books, including Dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces and mechanical shock of microstructures
- Provides provides comprehensive coverage for the analytical and computational approaches to model MEMS structures and devices
- Includes supplementary material: sn.pub/extras
Part of the book series: Microsystems (MICT, volume 20)
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Table of contents (8 chapters)
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Front Matter
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Back Matter
Keywords
About this book
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:
- Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
- Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures
- Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces
MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
Authors and Affiliations
Bibliographic Information
Book Title: MEMS Linear and Nonlinear Statics and Dynamics
Authors: Mohammad I. Younis
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4419-6020-7
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science+Business Media, LLC 2011
Hardcover ISBN: 978-1-4419-6019-1Published: 27 June 2011
Softcover ISBN: 978-1-4614-2912-8Published: 02 August 2013
eBook ISBN: 978-1-4419-6020-7Published: 27 June 2011
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XVI, 456
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Nanotechnology, Complex Systems, Statistical Physics and Dynamical Systems