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Silicon-on-Insulator Technology: Materials to VLSI

Materials to VLSI

  • Book
  • © 2004

Overview

Authors:
  1. Jean-Pierre Colinge

    1. University of California, USA

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-xiii
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  2. Introduction

    • Jean-Pierre Colinge
    Pages 1-8

  3. Soi Materials

    • Jean-Pierre Colinge
    Pages 9-68

  4. SOI Materials Characterization

    • Jean-Pierre Colinge
    Pages 69-116

  5. SOI CMOS Technology

    • Jean-Pierre Colinge
    Pages 117-150

  6. The SOI MOSFET

    • Jean-Pierre Colinge
    Pages 151-245

  7. Other SOI Devices

    • Jean-Pierre Colinge
    Pages 247-301

  8. The Soi Mosfet in a Harsh Environment

    • Jean-Pierre Colinge
    Pages 303-325

  9. SOI Circuits

    • Jean-Pierre Colinge
    Pages 327-360

  10. Back Matter

    Pages 361-366
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Keywords

About this book

Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, devices have been invented and forgotten, but, most importantly, twenty years during which SOI Technology has little by little proven it could outperform bulk silicon in every possible way. The turn of the century turned out to be a milestone for the semiconductor industry, as high-quality SOI wafers suddenly became available in large quantities. From then on, it took only a few years to witness the use of SOI technology in a wealth of applications ranging from audio amplifiers and wristwatches to 64-bit microprocessors.
This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis.

Authors and Affiliations

  • University of California, USA

    Jean-Pierre Colinge

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