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Table of contents (8 chapters)
Keywords
About this book
This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis.
Authors and Affiliations
Bibliographic Information
Book Title: Silicon-on-Insulator Technology: Materials to VLSI
Book Subtitle: Materials to VLSI
Authors: Jean-Pierre Colinge
DOI: https://doi.org/10.1007/978-1-4419-9106-5
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2004
Hardcover ISBN: 978-1-4020-7773-9Published: 29 February 2004
Softcover ISBN: 978-1-4613-4795-8Published: 03 October 2012
eBook ISBN: 978-1-4419-9106-5Published: 06 December 2012
Edition Number: 3
Number of Pages: XIII, 366
Topics: Circuits and Systems, Electrical Engineering, Electronics and Microelectronics, Instrumentation, Electrochemistry, Optical and Electronic Materials