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Chemical Vapor Deposition Polymerization

The Growth and Properties of Parylene Thin Films

Authors: Fortin, Jeffrey B., Toh-Ming Lu

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eBook $119.00
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  • ISBN 978-1-4757-3901-5
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  • Immediate eBook download after purchase
Hardcover $159.99
price for USA in USD
  • ISBN 978-1-4020-7688-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $159.99
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  • ISBN 978-1-4419-5413-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Table of contents (7 chapters)

  • Introduction

    Fortin, Jeffrey B., Ph.D. (et al.)

    Pages 1-7

  • Deposition Equipment

    Fortin, Jeffrey B., Ph.D. (et al.)

    Pages 9-22

  • Step-by-Step Guide to Depositing Parylene

    Fortin, Jeffrey B., Ph.D. (et al.)

    Pages 23-26

  • Parylene-N Precursor Chemistry

    Fortin, Jeffrey B., Ph.D. (et al.)

    Pages 27-40

  • Deposition Kinetics for Polymerization via the Gorham Route

    Fortin, Jeffrey B., Ph.D. (et al.)

    Pages 41-55

Buy this book

eBook $119.00
price for USA in USD (gross)
  • ISBN 978-1-4757-3901-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $159.99
price for USA in USD
  • ISBN 978-1-4020-7688-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $159.99
price for USA in USD
  • ISBN 978-1-4419-5413-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Chemical Vapor Deposition Polymerization
Book Subtitle
The Growth and Properties of Parylene Thin Films
Authors
Copyright
2004
Publisher
Springer US
Copyright Holder
Springer-Verlag US
eBook ISBN
978-1-4757-3901-5
DOI
10.1007/978-1-4757-3901-5
Hardcover ISBN
978-1-4020-7688-6
Softcover ISBN
978-1-4419-5413-8
Edition Number
1
Number of Pages
XVII, 102
Topics