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  • Conference proceedings
  • © 2004

Smart Sensors and MEMS

Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003

Part of the book series: NATO Science Series II: Mathematics, Physics and Chemistry (NAII, volume 181)

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Table of contents (14 papers)

  1. Front Matter

    Pages i-xv
  2. Novel Conversion Methods for Self-Adaptive Smart Sensors

    • Sergey Y. Yurish, Nikolay V. Kirianaki
    Pages 51-90
  3. Resonant Piezoelectric Devices as Physical and Biochemical Sensors

    • Fabien Josse, Richard W. Cernosek
    Pages 91-123
  4. Wireless Passive SAW Identification Marks and Sensors

    • Elke Mackensen, Leonhard Reindl
    Pages 155-202
  5. Precise Vectorial Magnetic Sensors

    • Pavel Ripka
    Pages 203-228
  6. Micro-Hall Magnetic Sensors: Physics, Technologies and Applications

    • Radivoje S. Popovic, Giovanni Boero, Pierre-Andre Besse
    Pages 229-253
  7. Modern Silicon-based MEMS Technology

    • Ulrich Mescheder
    Pages 255-272
  8. Thermal Design of Microelectronics Systems

    • Dmytro Fedasyuk, Volodymyr Makar
    Pages 289-329
  9. Chemical and Biological Sensors Based on Microcantilevers

    • P. G. Datskos, N. V. Lavrik, M. J. Sepaniak
    Pages 331-379
  10. Uncooled Infrared MEMS Detectors

    • P. G. Datskos, N. V. Lavrik
    Pages 381-419
  11. Bulk Acoustic Wave Sensors in Chemical Analysis

    • Maria Teresa S. R. Gomes
    Pages 421-445
  12. Back Matter

    Pages 475-480

About this book

The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.

It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.

The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.

Editors and Affiliations

  • National University Lviv Polytechnic, Ukraine

    Sergey Y. Yurish

  • University of Aveiro, Portugal

    Maria Teresa S. R. Gomes

Bibliographic Information

  • Book Title: Smart Sensors and MEMS

  • Book Subtitle: Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003

  • Editors: Sergey Y. Yurish, Maria Teresa S. R. Gomes

  • Series Title: NATO Science Series II: Mathematics, Physics and Chemistry

  • DOI: https://doi.org/10.1007/978-1-4020-2929-5

  • Publisher: Springer Dordrecht

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media B.V. 2004

  • Hardcover ISBN: 978-1-4020-2927-1Published: 07 March 2005

  • Softcover ISBN: 978-1-4020-2928-8Published: 18 February 2005

  • eBook ISBN: 978-1-4020-2929-5Published: 12 November 2007

  • Series ISSN: 1568-2609

  • Edition Number: 1

  • Number of Pages: XV, 480

  • Topics: Electronics and Microelectronics, Instrumentation, Classical Mechanics

Buy it now

Buying options

eBook USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access