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Integrated Optics, Microstructures, and Sensors

  • Book
  • © 1995

Overview

Authors:
  1. Massood Tabib-Azar

    1. Case Western Reserve University, Cleveland, USA

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Part of the book series: The Springer International Series in Engineering and Computer Science (SECS, volume 332)

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Table of contents (15 chapters)

  1. Front Matter

    Pages i-xxi
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  2. Integrated Optics

    1. Front Matter

      Pages 1-4
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    2. Two and One Dimensional Dielectric Waveguides

      • M. Tabib-Azar
      Pages 5-44

    3. Optical Properties of Materials

      • Meng-jen John Wu
      Pages 45-69

    4. Passive Optical Devices

      • M. Tabib-Azar
      Pages 71-97

    5. Active Optical Devices

      • M. Tabib-Azar
      Pages 99-115

    6. Complete Waveguide Structures

      • Meng-jen John Wu
      Pages 117-141

  3. Microstructures and Fabrication Methods

    1. Front Matter

      Pages 143-146
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    2. Fabrication of Microstructures

      • M. Tabib-Azar
      Pages 147-163

    3. Fabrication of Integrated Optics

      • M. Tabib-Azar
      Pages 165-192

    4. Mechanics of Deformable Silicon Microstructures

      • M. Tabib-Azar
      Pages 193-206

  4. Optical Sensors

    1. Front Matter

      Pages 207-209
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    2. Sensing Means and Sensor Shells

      • A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 211-235

    3. Integrated and Fiber Optics Sensors “Basic Concepts and Devices”

      • Margaret Tuma
      Pages 237-266

    4. Force, Displacement, and Acceleration Sensors

      • A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 267-284

    5. Optical Temperature Sensors

      • Glenn Beheim
      Pages 285-313

    6. Optical Chemical Sensors

      • S. Amartur, A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 315-345

    7. Sensor Design Examples and Additional Considerations

      • Meng-jen John Wu, M. Tabib-Azar
      Pages 347-363

    8. Comparison Between Electric, Magnetic, and Optical Sensors

      • A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 365-392

  5. Back Matter

    Pages 393-399
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Keywords

About this book

Controlling the mechanical, electrical, magnetic, and optical properties of materials by advanced fabrication methods (Le. ; Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition) has become the new paradigm in our research era. Sensors, being the most vital part of the electronic data processing and decision making machines, stand to gain the most from engineering of the properties of materials. Microfabrication technology has already contributed significantly to the batch fabrication of micro-sensors with higher over all qualities compared to their counterparts that are fabricated using other methods. Batch fabrication of micro-sensors i) results in more uniform properties of co-fabricated devices, ii) nearly eliminates the need for characterization of individual sensors, and iii) eliminates a need for laborious alignment procedures. A less obvious benefit of using microfabrication methods is the possibility of precise control over the dimensions of the sensor. This control enables engineering of some of the properties of the material which affect the sensor's operation. There are many examples of this in the literature. Optical sensors are known to have superior properties over their counterparts that use other (i. e. ; electrostatic and magnetic) means of detection. To name a few, these advantages are: i) immunity to electromagnetic interferences, ii) higher sensitivities compared to the other types of sensors, iii) simplicity of operation principles, and iv) simplicity of overall construction.

Authors and Affiliations

  • Case Western Reserve University, Cleveland, USA

    Massood Tabib-Azar

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