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Table of contents (10 chapters)
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Front Matter
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Back Matter
Keywords
About this book
The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters.
In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Authors and Affiliations
Bibliographic Information
Book Title: Scanning Probe Lithography
Authors: Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4757-3331-0
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2001
Hardcover ISBN: 978-0-7923-7361-2Published: 30 June 2001
Softcover ISBN: 978-1-4419-4894-6Published: 08 December 2010
eBook ISBN: 978-1-4757-3331-0Published: 14 March 2013
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XXIII, 197
Topics: Circuits and Systems, Optical and Electronic Materials, Manufacturing, Machines, Tools, Processes, Electrical Engineering, Characterization and Evaluation of Materials