Introduction to VLSI Process Engineering

1. Front Matter

   Pages i-xiii

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2. Coming age of VLSI

   • The Society of Chemical Engineers of Japan

   Pages 1-6

3. Semiconductor market

   • The Society of Chemical Engineers of Japan

   Pages 7-21

4. Evolution of semiconductors

   • The Society of Chemical Engineers of Japan

   Pages 22-49

5. Characteristics of VLSI

   • The Society of Chemical Engineers of Japan

   Pages 50-70

6. VLSI process engineering operations

   • The Society of Chemical Engineers of Japan

   Pages 71-120

7. Packaging and process monitoring technology

   • The Society of Chemical Engineers of Japan

   Pages 121-146

8. Production of silicon wafers and environmental problems

   • The Society of Chemical Engineers of Japan

   Pages 147-165

9. Process engineering aspects of VLSI production

   • The Society of Chemical Engineers of Japan

   Pages 166-192

10. Back Matter

    Pages 193-210

    PDF

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

• manufacturing
• process engineering
• semiconductor
• semiconductor technology
• silicon

...an extremely good text... - Microelectronics Journal

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