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Introduction to VLSI Process Engineering

Editors: Naka, Y., Sugawara, K., McGreavy, C. (Eds.)

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  • ISBN 978-94-011-1562-9
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About this book

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Reviews

...an extremely good text... - Microelectronics Journal

Table of contents (8 chapters)

Table of contents (8 chapters)

Buy this book

eBook $89.00
price for USA in USD (gross)
  • ISBN 978-94-011-1562-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $169.99
price for USA in USD
  • ISBN 978-0-412-39550-5
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
Softcover $119.99
price for USA in USD
  • ISBN 978-94-010-4682-4
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Introduction to VLSI Process Engineering
Editors
  • Y. Naka
  • K. Sugawara
  • C. McGreavy
Copyright
1993
Publisher
Springer Netherlands
Copyright Holder
Chapman & Hall
eBook ISBN
978-94-011-1562-9
DOI
10.1007/978-94-011-1562-9
Hardcover ISBN
978-0-412-39550-5
Softcover ISBN
978-94-010-4682-4
Edition Number
1
Number of Pages
XIII, 210
Topics

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